Advances in Development of MOEMS Devices: A Review

Author Name(s): Prof. Poorvi Joshi
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Micro-Opto-Electro-Mechanical Systems (MOEMS) are the combination of Micro-Electro-Mechanical Systems (MEMS) merged with Micro-optics. The precision workings of MEMS, its optical functionality, and fabrication techniques make possible a broad variety of movable and tunable mirrors, filters, and other optical structures. Microoptics has new features that are widely used in many applications than the classical optics. MOEMS contain movable components that have an effect on an optical signal that is pointed towards the surface of this optical component. In this paper, the focus is on MOEMS mirrors, filters, switches and few applications. Additionally, the emphasis is on finding the important and key issues for identification of scope for further work.


Recent development in micromachining approaches and processing techniques based on integrated circuits (IC) facilitate the manufacturing of IC-based complex opto-electronic and micro-electromechanical devices. Miniaturization of devices or mechanical elements is an important aspect in development of new technology. In 1993, for the first time, Dr. M. Edward Motamedi officially introduced MOEMS. In early 1990s, a contribution toward development in micro-optics technology was carried out by Rockwell Science Center in association with various research lab and government agencies. In 1992, system were developed with applied micro-optics for industrial applications, optical coupling enhancement using micro lens array [1], development of binary optics micro lens arrays [2], binary optics processing applied to a silicon substrate [3], integration of binary optics micro lens [4,5], beam steering device for communication system [6], coupling of laser to optical fibre [7], and fabrication of Micro lens array in various infrared material using ion milling processing [8].


The review presented in this paper focuses on MOEMS devices and few sensor applications. Additionally, the emphasis is also on finding the important and key issues for identification of further scope for research. Followings are the few issues identified after reviewing the literature: 1. The performance of MOEMS mirrors can be enhanced by close loop control for accurate position feedback. It will improve the applicability and increase the performance. 2. The key issues are low frequency response and high settling time after a large swing along synchronization of more mirrors. 3. Close loop control for better synchronization of more mirrors can provide better impact in applications of MOEMS mirrors like compact projection devices. MOEMS mirrors show higher settling time, but the driver execution time also increases. 4. Advances in fabrication technology can achieve λ/2 displacement for lower voltage. Driver circuit is important to drive all resonant axes and also for all MOEMS mirror devices. 5. Movable micro mirrors based on polysilicon micro hinge technology can be used for variety of applications with low-cost, batch-assembled, high-performance optoelectronic systems. Higher optical efficiency and improved contrast ratio can be achieved using hidden hinge DMD structure

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